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Directed Self-assembly of Block Co-polymers for Nano-manufacturing

Innbundet
Engelsk
Woodhead Publishing Series in Electronic and Optic
Directed Self-assembly of Block Co-polymers for Nano-manufacturing
Directed Self-assembly of Block Co-polymers for Nano-manufacturing
  • Format: Innbundet
  • Antall sider: 328
  • Språk: Engelsk
  • Forlag/Utgiver: SD Books
  • Serienavn: Woodhead Publishing Series in Electronic and Optic
  • EAN: 9780081002506
  • Utgivelsesår: 2015
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The directedself-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA.Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and relate